Accelerate research, reliability and failure analysis studies of semiconductor devices, materials and process development with the 4200A-SCS.
The highest performance parameter analyzer, it delivers synchronizing current-voltage (I-V), capacitance-voltage (C-V) and ultra-fast pulsed I-V measurements.
The 4200A-SCS is a customizable and fully-integrated parameter analyzer that provides synchronized insight into current-voltage (I-V), capacitance-voltage (C-V), and ultra-fast pulsed I-V characterization. The highest performance parameter analyzer, the 4200A-SCS accelerates semiconductor, materials, and process development.
| KEY FEATURES |
| Advanced measurement hardware for DC I-V, C-V, and pulsed I-V measurement types |
| Begin testing immediately with hundreds of user-modifiable application tests included in the Clarius software |
| Automated real-time parameter extraction, data graphing, analysis functions |
| SPECIFICATIONS |
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| 4200A-SCS Instruments and Modules Overview |
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| Model | Description | Key Measurements | Range | Measure Resolution |
| 4200-SMU | Medium Power Source-Measure Unit | DC I-V
Very Low Frequency C-V QSCV
| ±105 mA, ±210 V | 0.2 µV, 100 fA |
| 4201-SMU | Medium Power SMU with increased low I stability | DC I-V
Very Low Frequency C-V QSCV
| ±105 mA, ±210 V | 0.2 µV, 100 fA |
| 4210-SMU | High Power Source-Measure Uni | DC I-V
Very Low Frequency C-V QSCV
| ±1.05 A, ±210 V | 0.2 µV, 100 fA |
| 4211-SMU | High Power SMU with increased low I stability | DC I-V
Very Low Frequency C-V QSCV
| ±1.05 A, ±210 V | 0.2 µV, 100 fA |
| 4200-PA | Remote Preamplifier Module | DC I-V
Very Low Frequency C-V QSCV
| Extends current ranges for all SMUs | 0.2 µV, 10 aA |
| 4210-CVU | Capacitance-Voltage Unit | AC Impedance C-V, C-f, C-t | 1 kHz – 10 MHz
±30 V built-in DC bias
(60 V differential)
±210 V DC bias with SMUs
100 mV AC drive
| 1 aF, 1 nS, 0.001 degree |
| 4215-CVU | High Resolution Capacitance-Voltage Unit | AC Impedance C-V, C-f, C-t | 1 kHz – 10 MHz
±30 V built in DC bias
(60 V differential)
±210 V DC bias with SMUs
1 V AC drive
| 1 kHz 1 aF, 1 nS, 0.001 degree |
| 4200A-CVIV | I-V/C-V Multi-Switch Module | DC I-V and C-V with Automatic Switching | N/A | N/A |
| 4225-PMU | Ultra-Fast Pulse Measure Unit | Pulsed I-V SegmentARB® Multi-level Pulsing Transient Waveform Capture | ±40 V (80 Vp-p), ±800 mA 200 MS/s simultaneous I and V measure 2048 unique segments 20 ns PW source only 60 ns PW source/measure | 75 nA |
| 4225-RPM | Remote Preamplifier/Switch Module | Enables automatic switching between SMU, CVU and PMU | Extends current range of 4225-PMU unit | 200 pA |
| 4220-PGU | High Voltage Pulse Generator Unit | Pulsed Voltage Source SegmentARB® Multi-level Pulsing | ±40 V (80 Vp-p) 2048 unique segments | N/A |
| Ground Unit | Built-in, Low Noise Ground Unit | N/A | Triaxial connection: 2.6 A
Binding post: 9.5 A
| N/A |
| SPECIFICATIONS |
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| Model Overview |
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| Mainframe | Description |
| 4200A-SCS | Parameter Analyzer with 15.6” LCD display |
| 4200A-SCS-ND | Parameter Analyzer without LCD display |
| Instruments/Modules | Description |
| 4200-PA | Remote SMU Preamplifier Module |
| 4200-SMU | Medium Power Source Measure Unit |
| 4200-SMU-R | Field Installable, Medium Power Source Measure Unit |
| 4200-SMU/PA-R | Field Installable, Medium Power Source Measure Unit with Preamplifier |
| 4201-SMU | Medium power Source Measure Unit for high-capacitance setups |
| 4201-SMU-R | Field installable medium power Source Measure Unit for high-capacitance setups |
| 4201-SMU/PA-R | Field Installable, medium Power Source Measure Unit for high-capacitance setups with Preamplifier |
| 4210-SMU | High Power Source Measure Unit |
| 4210-SMU-R | Field Installable, High Power Source Measure Unit |
| 4210-SMU/PA-R | Field Installable, High Power Source Measure Unit with Preamplifier |
| 4211-SMU | High power Source Measure Unit for high-capacitance setups |
| 4211-SMU-R | Field installable high power Source Measure Unit for high-capacitance setups |
| 4211-SMU/PA-R | Field Installable, high power Source Measure Unit for high-capacitance setups with Preamplifier |
| 4215-CVU | High Resolution Multi-frequency C-V Unit |
| 4225-PMU | Ultra-fast Pulsed I-V Unit |
| 4220-PGU | Pulse Generator Unit |
| 4225-RPM | Remote Preamplifier/Switch Module |
| 4200A-CVIV | CVIV Multi-Switch Module |
| 4200-CVU-PWR | C-V Power Package |
