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The Keithley 6517B Electrometer / High Resistance Meter is a high-performance 5½-digit electrometer designed for precision measurement of ultra-low currents, high resistance, charge, and high-impedance voltage. Building on the capabilities of the 6517A, the 6517B offers enhanced accuracy, improved measurement speed, and a built-in ±1000 V programmable voltage source, making it ideal for insulation resistance testing, leakage current analysis, and resistivity measurements.
With current measurement sensitivity down to 1 fA (10⁻¹⁵ A) and resistance measurements up to 10¹⁶ Ω, the 6517B is widely used in research laboratories, electronics manufacturing, materials science, and semiconductor testing. It is also fully compatible with accessories such as the Keithley 8009 Resistivity Test Fixture for ASTM-compliant surface and volume resistivity measurements.
Choose from three sensitive options for precision high resistance and low current measurements. The 5½-digit Model 6514 and Model 6517B Electrometers offer 1fA sensitivity, >200TΩ input impedance on voltage measurements, and charge measurements down to 10fC. The 6½-digit Model 6430 Sub-Femtoamp Remote SourceMeter SMU Instrument can measure current with 1aA sensitivity. Its low noise and drift performance make it ideal for research on single electron devices, highly resistive nanowires and nanotubes, polymers, and electrochemical applications.
The Keithley 6517B Electrometer/High Resistance Meter is the worldwide research laboratory standard for sensitive measurements. With over 60 years of low level measurement expertise, Keithley electrometers provide reliable measurements of current levels down to 10 aA (10×10–18 A), charge levels down to 1 fC, and the highest resistance measurements available up to 1018 Ω. The 6517B is also capable of measuring the largest voltage range—up to 200 V—with an input impedance exceeding 200 TΩ. All this performance is built into an instrument that operates as simply as a digital multimeter.
| KEY FEATURES |
| Extremely low noise (0.4fAp-p for 6430, <1fA for 6517B and 6514) |
| Resistance measurements up to 1016Ω (6517B) |
| Remote PreAmp can be located at the signal source (6430) |
| Low burden voltage |
| Built-in ±1kV voltage source with sweep capability (6517B) |
| Optional Model 8009 Resistivity Chamber for measuring volume and surface resistivities of sample materials (6517B) |
| High measurement speeds even on low-level signals |
| Programmable digital I/O and built-in interfaces |
| BENEFITS |
| Ensures more accurate measurements of the extremely low currents common in device and materials research. |
| Measures resistance on ultra-high resistance materials and insulators accurately. |
| Allows making a direct or very short connection to the signal source, minimizing noise sources such as cable noise. |
| Eliminates errors that affect the accuracy of low current measurements. |
| Simplifies performing leakage, breakdown, and resistance testing; As well as volume (Ω-cm) and surface resistivity (Ω/square) measurements on high resistivity materials. |
| Protects you from contact with potentially hazardous voltages; Opening the lid of the chamber automatically turns off the instrument’s voltage source. |
| Allows faster low-level component testing. |
| Simplifies building automated component test systems. |
| SPECIFICATIONS | |
| Model: 6517B | |
| Feature | Parameter |
| Display Resolution | 5½ digits |
| Current Measurement Range | 1 fA to 20 mA |
| Voltage Measurement Range | 1 µV to 200 V |
| Resistance Measurement Range | Up to 10¹⁶ Ω |
| Charge Measurement Range | 10 fC to 2 µC |
| Built-in Voltage Source | ±1000 V |
| Input Impedance | >200 TΩ |
| Input Bias Current | <3 fA |
| Burden Voltage | <20 µV (lowest ranges) |
| Maximum Reading Rate | Up to 425 readings/second (internal buffer) |
| Interfaces | USB, GPIB (IEEE-488), RS-232 |
| Display | Vacuum Fluorescent Display (VFD) |
| Dimensions | 89 × 213 × 370 mm |
| Weight | Approximately 5.5 kg |
| SPECIFICATIONS | ||
| Model: 6517A - 6517B Overview | ||
| Model | Keithley 6517A | Keithley 6517B |
| Display Resolution | 5½ digits | 5½ digits |
| Current Measurement | 1 fA to 20 mA | 1 fA to 20 mA |
| Resistance Measurement | Up to 10¹⁶ Ω | Up to 10¹⁶ Ω |
| Built-in Voltage Source | ±1000 V | ±1000 V |
| Input Impedance | >200 TΩ | >200 TΩ |
| Reading Buffer | 15,706 readings | 50,000 readings (battery-backed) |
| Reading Speed | Up to 125 readings/sec | Up to 425 readings/sec |
| Settling Time | Standard | Up to 5× faster for low-current measurements |
| Firmware | Fixed firmware | Flash-upgradable firmware |
| Serial Communication | Up to 19,200 baud | Up to 115,200 baud |
| Interfaces | GPIB, RS-232 | USB, GPIB, RS-232 |
| Best For | High-resistance and low-current measurements | Higher-speed testing, larger data acquisition and improved connectivity |
| SPECIFICATIONS | |||||
Series 6500, 6430 High Resistance / Low Current Electrometers Overview | |||||
| Model | Current | Voltage | Resistance | Charge | Source |
| 6514 | 100aA - 20mA | 10µV - 200V | 10mΩ - 200GΩ | 10fC - 20μC | - |
| 6517B | 10aA - 20mA | 10µV - 200V | 100Ω - 10PΩ | 10fC - 2μC | 0 - ±1000V |
| 6430 | 10aA - 100mA | 1µV - 200V | 1µΩ - >20TΩ | - | 0 - ±200V 0 - ±100mA |
| SPECIFICATIONS | |
Keithley 6517B Electrometer/High Resistance Meter | |
| Model | Description |
| 6517B | Electrometer/High Resistance Meter |
| Supplied Accessories | |
| 237-ALG-2 | Low Noise Triax Cable, 3-slot Triax to Alligator Clips, 2 m (6.6 ft) |
| 8607 | Safety High Voltage Dual Test Leads |
| 6517-TP | Thermocouple Bead Probe |
| CS-1305 | Interlock Connector |
| Available Software | |
| KickStartFL-HRMA | High Resistivity Measurement Application Floating License; for the KickStart Instrument Software Control Environment (Requires KickStart Instrument Control Software version 1.9 or later). |
| Available Accessories | |
| Test Fixture | |
| 8009 | Resistivity Test Fixture |
| Scanner Cards | |
| 6521 | Low Current Scanner Card |
| 6522 | Voltage/Low Current Scanner Card |
| Cables | |
| 6517B-ILC-3 | Interlock Cable |
| 7007-1 | Shielded IEEE-488 Cable, 1 m (3.2 ft) |
| 7007-2 | Shielded IEEE-488 Cable, 2 m (6.5 ft) |
| 7009-5 | RS-232 Cable |
| 7078-TRX-x | Low Noise Triax Cable, 3-Slot Triax Connectors, x=3: 0.9 m (3 ft), x=10: 3 m (10 ft), x=20: 6 m (20 ft) |
| 8501-1 | Trigger Link Cable, 1 m (3.3 ft) |
| 8501-2 | Trigger Link Cable, 2 m (6.6 ft) |
| 8503 | Trigger Link Cable to 2 male BNCs, 1 m (3.3 ft) |
| 8607 | 1 kV Source Banana Cables |
| Probes | |
| 6517-RH | Humidity Probe with Extension Cable |
| 6517-TP | Temperature Bead Probe (included with 6517B) |
| Other | |
| CS-1305 | Interlock Connector |
| Adapters | |
| 237-BNC-TRX | Male BNC to 3-Lug Female Triax Adapter |
| 237-TRX-NG | Triax Male-Female Adapter with Guard Disconnected |
| 237-TRX-T | 3-Slot Male Triax to Dual 3-Lug Female Triax Tee Adapter |
| 237-TRX-TBC | 3-Lug Female Triax Bulkhead Connector (1.1 kV rated) |
| 7078-TRX-BNC | 3-Slot Male Triax to BNC Adapter |
| 7078-TRX-GND | 3-Slot Male Triax to BNC Adapter, guard removed |
| 7078-TRX-TBC | 3-Lug Female Triax Bulkhead Connector with Cap |
| Rack Mount Kits | |
| 4288-1 | Single Fixed Rack Mounting Kit |
| 4288-2 | Dual Fixed Rack Mounting Kit |
| 4288-4 | Shelf Rack Mount kit, for 3U and 2U high instruments |
| 4288-5 | Shelf Mount Rack Kit, for two 2U high instruments |
| 4299-7 | Universal Shelf Mount Rack Kit |
| GPIB Interfaces | |
| KPCI-488LPA | IEEE-488 Interface/Controller for the PCI Bus |
| KUSB-488B | IEEE-488 USB-to-GPIB Interface Adapter |
| SPECIFICATIONS | |
Series 6500, 6430 High Resistance / Low Current Electrometers Overview | |
| Model Number | Description |
| 6430 | Sub-femtoamp Remote SourceMeter SMU Instrument |
| 6514 | Programmable Electrometer |
| 6517B | Electrometer/High Resistance Meter |





